イオン照射および有機モノマーガス吸着の併用による石英ガラスへのはっ水性付与

抄録

To improve the water repellency of inorganic materials, silica glass substrates treated with ion irradiation and organic monomer gas adsorption were evaluated using the contact angle to distilled water. Changes of the contact angle by cleaning in solvents on standing after aging in air and after rubbing were measured.
Samples that adsorbed monomer gas immediately after ion irradiation showed the largest contact angle and had the highest water repellency. The contact angle of samples became smaller in the order of ion irradiation only, monomer gas adsorption only, untreated. Samples that adsorbed monomer gas immediately after ion irradiation showed small dispersion in the contact angle. These samples thus had small change on standing and showed water repellency even after cleaning in solvents and after rubbing.
Surface analyses by X-ray photoelectron spectroscopy (XPS) revealed that ion irradiation enhanced monomer gas adsorption, in addition to carbon deposition for samples which adsorbed organic monomer gas immediately after ion irradiation. The result also suggested the formation of a low-surface-energy layer by the reaction of the silica glass surface and organic monomer gas.