表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
アークイオンプレーティングによって作製した非晶質窒化炭素薄膜の耐摩耗性
杉村 博之田島 信宏河田 一喜高井 治
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2001 年 52 巻 12 号 p. 887-890

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Thin films of amorphous carbon (a-C) and its nitride (a-C: N) have been prepared by shielded arc ion plating. Their tribological properties were evaluated based on the ball-on-disk method using a SUJ 2 ball. Compared with TiN, both a-C and a-C: N films showed excellent wear-resistivities. Frictional coefficients of the a-C and a-C: N films were almost half of that of the TiN film. Furthermore, wear of the SUJ 2-balls with the films were much smaller than that with the TiN film. The a-C and a-C: N films are promising for tribological coatings. Although, difference in wear-resistivity between the a-C and a-C: N films was negligible, the a-C: N films less wore the SUJ 2-balls than the a-C films did. This is probably due to a higher chemical reactivity of a-C to Fe than that of a-C: N.
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