抄録
In mixed solutions of ethylene glycol and water, Al-Nd alloy films were anodized at 1mA cm-2 up to 100V. Al-10wt.% Nd and Al-3wt.% Nd sputtered films were used as substrates, and electrolytes containing various kinds of solute were used. After annealing at 300°C, FT-IR spectrum and dielectric strength were measured for each sample. By anodizing in the electrolytes, the species originating from the ethylene glycol are incorporated into the oxide films, as well as the anions of the solute. As a consequence of the incorporation, the electrical properties of the anodic films are varied. Whereas various kinds of electrolyte were used for two kinds of Al-Nd substrates, FTIR peak position associated with Al-O stretching vibration and the dielectric strength had a certain relationship. Therefore, it is considered that the insulating property mainly depends on the microstructure of the oxide films, and that the influence of a change in the oxide film composition is very small.
