This Study features research and development into a novel air conditioning system to halve the energy used for air conditioning, which represents 40% of the total energy consumption in clean rooms. The main target involves developing new outdoor air treatment equipment requiring no refrigerators. The operational conditions of the liquid desiccant system were determined by experiments. The method of membrane distillation under vacuum was selected from the several means of regeneration available, excluding evaporation by heating. Energy saving features for vacuum systems can be planned if our semiconductor manufacturing technology and newly developed pumps are installed.
