抄録
In this report, production of a passive sampler for ammonia and the application are described. The sampling material used an active carbon which added sulfuric acid (commercial product). And the diffusion tube used commercial use. It was determined on the sampling rate of the passive sampler by changing concentration of the standard gas of the ammonia. The passive sampler for ammonia was applied to the life of a chemical filter for ammonia removed of the semiconductor clean room.
