Force Measurement Acting on the Moving Part of a Linear Air Bearing

抄録

A method for evaluating forces acting on the moving part of pneumatic linear bearings has been proposed by the author and is under development. The total force acting on the moving part is accurately measured as the inertial force using an optical interferometer. Then the components of the force, such as the force component depending on position, the force component depending on velocity, are evaluated using the least squares method. The present status of the development and the future prospects will be discussed.