Polymer micro cantilevers for force controlled atomic force microscopy 2 —Fabrication of cantilevers—

Nobuhiro Kato; Choong Sik Park; Toshiro Matsumoto; Hisao Kikuta; Koichi Iwata

doi:10.11499/sicep.2002.0.223.0

SICE Annual Conference 2002

DOI https://doi.org/10.11499/sicep.2002.0.223.0

会議情報

主催: The Society of Instrument and Control Engineers

共催: IEEE/Industiral Electronic Society, IEEE/Robotics and Automation Society, IEEE/Control System Society

Polymer micro cantilevers for force controlled atomic force microscopy 2

—Fabrication of cantilevers—

Nobuhiro Kato, Choong Sik Park, Toshiro Matsumoto, Hisao Kikuta, Koichi Iwata

著者情報

キーワード: photo plastic, cantilever, force controlled atomic force microscope

会議録・要旨集フリー

p. 223

詳細

抄録

The micro cantilever made of entirely plastic material has been developed. The probing tip, cantilever and base are made of same photo plastic. By arranging the geometry of the cantilever, its spring constant and resonant frequency is controlled. The low Q of the polyimide improves the stability of the force controlled atomic force microscope. The fabrication error in cantilever geometry was 1.5%. The estimated resonant frequency has a good agreement with the designed value.

責任著者(Corresponding author)

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