Precision Alignment of Pulse Stage Using Moire Signals

Jing-Nan Liu; Lizhong Zhou; Hideo Uchida; Akihiro Kono; Rina Sharma; Vijay T. Chitnis; Hideo Furuhashi; Yoshiyuki Uchida

doi:10.11499/sicep.2002.0.83.0

SICE Annual Conference 2002

DOI https://doi.org/10.11499/sicep.2002.0.83.0

会議情報

主催: The Society of Instrument and Control Engineers

共催: IEEE/Industiral Electronic Society, IEEE/Robotics and Automation Society, IEEE/Control System Society

Precision Alignment of Pulse Stage Using Moire Signals

Jing-Nan Liu, Lizhong Zhou, Hideo Uchida, Akihiro Kono, Rina Sharma, Vijay T. Chitnis, Hideo Furuhashi, Yoshiyuki Uchida

著者情報

キーワード: Alignment, Lithography, Moire, Grating, Positioning

会議録・要旨集フリー

p. 83

詳細

抄録

A simple and high accuracy optical intelligent alignment system using a position sensor of a diffraction grating is proposed by our Asian group. From a simulation of this system using a permeation type diffraction grating, we can conclude that it is possible to improve the wide position definition from ±0.25mm to ±12μm with the precision accuracy of ±4nm.

責任著者(Corresponding author)

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