Section B
Evaluation of Preferential Orientation in the Film Depth Direction by Two-Dimensional Grazing Incident Wide-Angle X-ray Diffraction of CeO2 Film on Sapphire Single Crystal Substrate with Different Film Formation Conditions
Tatsuo Fukano, Hiroshi Nozaki, Keita Funayama, Takashi Katsuno, Tomoyuki Koganezawa, Masashi Harada, Hiroyuku Kawaura
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2022 Volume 10 Issue 6 Pages 530-535
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