Abstract
Preliminary focusing tests of a new type of high-aspect-ratio zone plate was performed. It is fabricated by atomic layer deposition, depositing multilayer zoned nanolaminate films around cylindrical silicon precursors to form the Fresnel zone structure. Owing to its high aspect ratio, it can be used for high-energy X-ray microscopy. As the narrowest zone structures can reach sub-10 nm, the corresponding spatial resolution may be expected. A knife-edge scan method was applied to evaluate the focused beam size. The beam size was estimated to be approximately 1.6 μm. Unfortunately, this size was much larger than expected, indicating the imperfection of the zone structures. It was found that further fabrication improvements are necessary for practical use.
