Section A
Study of Clustering of Impurities Doped in Si Crystals Depending on Annealing Conditions and Concentration by Using Soft X-ray Photoelectron Spectroscopy
Kazuo Tsutsui, Yohei Miyata, Jun Kanehara, Hiroshi Nohira, Takeo Hattori, Hiroshi Iwai, Takayuki Muro, Toyohiko Kinoshita
Author information
2016 Volume 4 Issue 1 Pages 11-17
Details
