SPring-8/SACLA Research Report
Online ISSN : 2187-6886
Section C
Study on Alignment Method for Grazing Incidence X-ray Scattering
Noboru OhtaHiroshi SekiguchiShiho Yada
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JOURNAL OPEN ACCESS

2020 Volume 8 Issue 2 Pages 441-444

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Abstract
In the grazing incidence X-ray scattering system, it is necessary to align the in-plane rotation axis of the sample stage and the normal of the substrate. Since the thin film structure such as polymers is formed on the substrate, it is necessary to complete the alignment while keeping low X-ray dose. We examined an alignment method using the arrival time mode of the timepix.
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この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
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