内部に拘束粉体層を有するサンドイッチ基板の拘束焼結

抄録

This paper describes constrained sintering of substrates emoloying a sandwich structure, in which an alumina layer constrains the shrinkage of glass-alumina mixed layers during sintering. Because the inner-constraining alumina layer does not shrink at the sintering temperature of the glass-alumina mixed layer, the glass-alumina mixed layer is sintered without shrinkage. In addition to this, the inner-self-constraining alumina layer is densificated by the penetration of molten glass from the glass-alumina mixed layers, resulting in increased bending strength of the laminated substrates.