抄録
In this paper, system identification of anti-vibration units in semiconductor exposure apparatus is discussed. Since the semiconductor exposure apparatus has multi-degrees-of-freedom (multi-DOF) motional mechanism, the system must be treated as a Multi-Input-Multi-Output (MIMO) system. As a modeling method, the system identification methods are utilized to semiconductor exposure apparatus, in particular subspace based state-space system identification (4SID) method is applied. Effectiveness of the 4SID method to MIMO system identification is examined through experimental data. Moreover, an estimation method of physical parameters of semiconductor exposure apparatus based on identified state-space model is presented. By identifying physical parameters of semiconductor exposure apparatus, it will be expected that fault detections and diagnosis of the apparatus can be done easily.
