酸化物試料のX線光電子分光法による定量分析

抄録

We report results of a joint research about the quantitative analysis of SiO₂, Al₂O₃, MgO and forsterite plates by X-ray photoelectron spectroscopy (XPS). At first, we obtained the relative sensitivity factors (RSFs) using the standard oxides in order to clarify the difference in instrumental responses among instruments and analytical conditions. Then, we carried out the quantitative analysis of a forsterite sample using the above-mentioned RSFs to determine the deviation in quantitative values among laboratories.
The RSFs obtained with the standard oxides depend on analyser mode ( ΔE=const. or ΔE/E=const.). In the case of measuring with the same analyser mode, the deviation in RSFs among instruments was within ±20% on the high kinetic energy side but this became large on the low kinetic energy side. On the other hand, the theoretical RSFs which were calculated using instrumental functions, inelastic mean free paths and photo-ionisation cross sections were 1.3 times as large as the experimental RSFs.
The quantitative analysis of a forsterite plate showed that the deviation in quantitative values among laboratories was within ±10%. However, the quantitative value of magnesium measured with XPS was lower than the chemical composition.
These results demonstrate that the quantification using the experimental RSFs leads to the small deviation in quantitative values among laboratories, but the these quantitative values include the difference from chemical composition.