抄録
The effects of substrate temperatures during deposition and N2 gas addition to Ar sputtering gas on the magnetic properties and crystalline microstructure of Co/Pd multilayered films were investigated. The Co/Pd multilayered film deposited at a substrate temperature of 230°C with Ar containing N2 of 0.06 mTorr exhibited weaker intergranular exchange coupling than that deposited at room temperature without N2 addition. Plan-view TEM observation revealed that the crystal grains in the Co/Pd multilayered film, which was subjected to the heating process with N2 additive gas, were physically isolated by vacant grain boundaries, resulting in the decrease in intergranular exchange coupling.
