抄録
We studied the magnetic anisotropy in an FeSiC soft magnetic film. The film was deposited at room temperature without applying a magnetic field using conventional DC magnetron sputtering. The as-deposited film had a fine-crystalline structure and a magnetic easy axis in the radial direction of the disk substrate without any textures. The radial magnetic anisotropy in the film was not induced by film stress because it was produced even when there was no film stress. The film was found not to have the anisotropic arrangement of the fine-crystal grains because the electron-beam diffraction pattern was a ring pattern. This meant that the radial magnetic anisotropy in the film was not the magnetocrystalline anisotropy. The anisotropy field was strongly dependent on the distance from the center of the disk substrate. Our findings suggested that the radial magnetic anisotropy in the fine-crystalline FeSiC soft magnetic film was caused by the nano-scale directional deposition of the sputtered particles.
