抄録
We studied effect of pressure on inductively-coupled plasmas sustained with multiple low-inductance internal-antenna units. With increasing pressure, the plasma densities on the substrate folder increased to attain a plasma density of 1.4 x 10^11 cm-3 at an argon pressure of 13 Pa. The plasma potential and the potential drop decreased drastically with decreasing Ar pressure. These dependencies are related to changes in the electron temperature and the antenna RF voltage. The ion energy distributions considerably decreased with increasing Ar pressure. The peak energies of the distributions depended more strongly on pressure and corresponded to the magnitude of plasma potential. The FWHM of the distributions decreased with lowering the antenna RF voltages by decrease in Ar pressure.
