Transactions of the Materials Research Society of Japan
Online ISSN : 2188-1650
Print ISSN : 1382-3469
ISSN-L : 1382-3469
Regular Papers
Preparation and Characterization of Silica Films on PBT Substrate by Dip Coating with PDMS/PHPS Solution
Akio Shimomura, Hajime Horikawa, Takashi Ogihara, Junko Shimomura
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ジャーナル フリー

2010 年 35 巻 3 号 p. 689-692

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抄録
Silica films were successfully prepared on a polybutyleneterephthalate (PBT) substrate by dip coating using a perhydropolysilazane (PHPS) / polydimethylsilazane (PDMS) solution. The effect of thermal treatment on conversion from PDMS / PHPS to silica was investigated in detail by using SEM and FT-IR. The prepared Silica film had a thickness of 160 nm with a smooth surface and was crack free at 50 mass% of PDMS. The color pollution on silica films was characterized using a color meter. The resistance to color pollution was highest when the PDMS content was 25 mass%. The mechanical properties of silica films were also examined by performing pencil hardness and Vickers hardness tests. The Vickers hardness of the silica film decreased with increasing PDMS content. The pencil hardness of the silica film was 9 H, regardless of the PMDS content.
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© 2010 The Materials Research Society of Japan
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