Preparation of ordered 1x1 surface of rutile TiO₂ (001) for surface x-ray diffraction study

抄録

Objective of this study was to obtain ordered surface with 1x1 structure on rutile TiO₂ (001). Surface of rutile TiO₂ (001) was treated by etching with 5 and 20 % HF solution and/or by annealing at 327～820°C. Then it was evaluated by LEED (low energy electron diffraction) and SXRD (surface x-ray diffraction). The results indicated that after ultrasonic cleaning with ethanol, annealing at 410°C or etching with 5 % HF solution for 10 min. is a good method to obtain ordered 1x1 surface among the methods investigated in this study. Good profiles of CTR (crystal truncation rod) were obtained on rutile TiO₂ (001). The analysis of CTR profiles indicated that the rutile TiO₂ (001) surface with the 1x1 structure had partly {011}-faceted structure and that both oxygen and titanium at the surface moved towards the bulk.