2017 年 E100.C 巻 3 号 p. 298-304
Antenna-coupled kinetic inductance detectors (KIDs) have recently shown great promise as microwave detection systems with a large number of channels. However, this technique, still has difficulties in eliminating the radiation loss of the resonator signals. To solve this problem, we propose a design in which the absorption area connected to an antenna is located on the ground-side of a coplanar waveguide. Thereby, radiation loss due to leakage from the resonator to the antenna can be considerably reduced. This simple design also enables the use of a contact aligner for fabrication. We have developed KIDs with this design, named as the ground-side absorption (GSA)-KIDs and demonstrated that they have higher quality factors than those of the existing KIDs, while maintaining a good total sensitivity.