2017 Volume E100.C Issue 6 Pages 602-606
CMOS amperometric sensors with a microelectrode array offer great potential for counting bacteria because of their low cost, compact size, and ease of use. This paper presents a current-integration-based CMOS amperometric sensor for high-sensitivity bacteria counting. It has a current integrator for noise reduction and reportedly the most large-scale microelectrode array (1024 × 1024). This proposed sensor can count the number of bacteria ranging from a single cell to approximately a million cells. A prototype chip was fabricated using two-poly three-metal (2P3M) 0.6-µm standard CMOS technology. A 7.6 × 7.1-mm2 chip operates from a 5V supply at 1.9mA. In addition, by using the prototype chip, we performed electrochemical measurement and partial 2D imaging of silicone through constant potential amperometry. The measurement results indicate that the proposed sensor chip was able to accurately readout redox current from the 1024 × 1024 sensor array.