2021 年 E104.C 巻 9 号 p. 429-434
One of the highest performing single-photon detectors in the visible and near-infrared regions is the superconducting nanostrip photon detector (SNSPD or SSPD), which usually uses NbN or NbTiN as the superconductor. Using other superconductors may significantly improve, for example, the operating temperature and count rate characteristics. This paper briefly reviews the current state of the potential, characteristics, thin film growth, and nanofabrication process of SNSPD using various superconductors.
