A 35-GHz, 0.8-A/W and 26-µm Misalignment Tolerance Microlens-Integrated p-i-n Photodiodes

Yong LEE; Kazuyuki NAGATSUMA; Kazuhiko HOSOMI; Takuma BAN; Kazunori SHINODA; Koichiro ADACHI; Shinji TSUJI; Yasunobu MATSUOKA; Shigehisa TANAKA; Reiko MITA; Toshiki SUGAWARA; Masahiro AOKI

doi:10.1587/transele.E94.C.116

Regular Section

A 35-GHz, 0.8-A/W and 26-µm Misalignment Tolerance Microlens-Integrated p-i-n Photodiodes

Yong LEE, Kazuyuki NAGATSUMA, Kazuhiko HOSOMI, Takuma BAN, Kazunori SHINODA, Koichiro ADACHI, Shinji TSUJI, Yasunobu MATSUOKA, Shigehisa TANAKA, Reiko MITA, Toshiki SUGAWARA, Masahiro AOKI

Author information

Yong LEE
Central Research Laboratory, Hitachi, Ltd.
Photonics Electronics Technology Research Association (PETRA)
Kazuyuki NAGATSUMA
Photonics Electronics Technology Research Association (PETRA)
Kazuhiko HOSOMI
Central Research Laboratory, Hitachi, Ltd.
Takuma BAN
Central Research Laboratory, Hitachi, Ltd.
Photonics Electronics Technology Research Association (PETRA)
Kazunori SHINODA
Central Research Laboratory, Hitachi, Ltd.
Photonics Electronics Technology Research Association (PETRA)
Koichiro ADACHI
Central Research Laboratory, Hitachi, Ltd.
Photonics Electronics Technology Research Association (PETRA)
Shinji TSUJI
Central Research Laboratory, Hitachi, Ltd.
Photonics Electronics Technology Research Association (PETRA)
Yasunobu MATSUOKA
Central Research Laboratory, Hitachi, Ltd.
Shigehisa TANAKA
Central Research Laboratory, Hitachi, Ltd.
Photonics Electronics Technology Research Association (PETRA)
Reiko MITA
Central Research Laboratory, Hitachi, Ltd.
Toshiki SUGAWARA
Central Research Laboratory, Hitachi, Ltd.
Masahiro AOKI
Telecommunication and Network Systems, Hitachi, Ltd.

Keywords: p-i-n photodiode, microlens, 100Gbit/s Ethernet, quadplexer receiver-optical-subassembly module

JOURNAL RESTRICTED ACCESS

2011 Volume E94.C Issue 1 Pages 116-119

DOI https://doi.org/10.1587/transele.E94.C.116

Details

Abstract

We fabricated a p-i-n photodiode (PD) with an integrated microlens, and demonstrated its high performance capabilities including high speed (35GHz), high responsivity (0.8A/W), and large misalignment tolerance (26µm), and an error-free 25-Gbit/s 10-km single-mode fiber transmission by using a 100-Gbit/s Ethernet quadplexer receiver module with the PDs.

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