Abstract
We report on the enhancement of system detection efficiency in a superconducting nanowire single-photon detector (SNSPD) by applying the optical cavity structure. The nanowire was made using 4-nm-thick NbN thin films and covered with an SiO cavity and Au mirror designed for 1300-1600nm wavelengths. The device is mounted into fiber-coupled packages, and installed in a practical multichannel system based on GM cryocoolers. System detection efficiency depends on the absorptance of cavity structure, and reached 28% and 40% at 1550nm and 1310nm wavelengths, respectively. These values were considerably higher than an SNSPD without optical cavity.