Investigation of Roll-to-Sheet Imprinting for the Fabrication of Thin-film Transistor Electrodes

Abstract

We applied a roll-to-sheet imprinting process to a large-scale substrate. Patterned ruthenium oxide (RuO₂) electrodes were fabricated on both glass and flexible substrates. The resistivity of the electrodes on a glass substrate was 3.5 × 10^-5 Ω cm, which indicates that this technique is useful for the fabrication of thin-film transistor (TFT) electrodes.