IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Electronic Displays
Investigation of Roll-to-Sheet Imprinting for the Fabrication of Thin-film Transistor Electrodes
Hiroaki KOYAMAKazuhiro FUKADAYoshitaka MURAKAMISatoshi INOUETatsuya SHIMODA
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2014 年 E97.C 巻 11 号 p. 1042-1047

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We applied a roll-to-sheet imprinting process to a large-scale substrate. Patterned ruthenium oxide (RuO2) electrodes were fabricated on both glass and flexible substrates. The resistivity of the electrodes on a glass substrate was 3.5 × 10-5 Ω cm, which indicates that this technique is useful for the fabrication of thin-film transistor (TFT) electrodes.
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© 2014 The Institute of Electronics, Information and Communication Engineers
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