2015 Volume E98.C Issue 3 Pages 207-218
A precise measurement of Cosmic Microwave Background (CMB) provides us rich information about the universe. In particular, its asymmetric polarization patterns, B-modes, are smoking gun signature of inflationary universe. Magnitude of the B-modes is order of 10 nK. Its measurement requires a high sensitive millimeter-wave telescope with a large number of superconducting detectors on its focal plane. Microwave Kinetic Inductance Detector (MKID) is appropriate detector for this purpose. MKID camera has been developed in cooperation of National Astronomical Observatory of Japan (NAOJ), Institute of Physical and Chemical Research (RIKEN), High Energy Accelerator Research Organization (KEK), and Okayama University. Our developments of MKID include: fabrication of high-quality superconducting film; optical components for a camera use; and readout electronics. For performance evaluation of total integrated system of our MKID camera, a calibration system was also developed. The system was incorporated in a 0.1 K dilution refrigerator with modulated polarization source. These developed technologies are applicable to other types of detectors.