CMOS-Based Optoelectronic On-Chip Neural Interface Device

Abstract

On-chip neural interface devices based on CMOS image sensor technology are proposed and demonstrated. The devices were designed with target applications to optogenetics in bioscience. Multifunctional CMOS image sensors equipped with an addressable on-chip electrode array were integrated with a functional interface chip that contained embedded GaInN light emitting diodes (LEDs) and electrodes to create a neural interface. Detailed design information regarding the CMOS sensor chip and the functional interface chip including the packaging structure and fabrication processes are presented in this paper. The on-chip optical stimulation functionality was demonstrated in an in vitro experiment using neuron-like cells cultured on the proposed device.