A novel displacement sensor based on a frequency delta-sigma modulator and its application to a stylus surface profiler

Abstract

A novel displacement sensor was proposed based on a frequency delta-sigma modulator (FDSM) employing a microwave oscillator. To demonstrate basic operation, we fabricated a stylus surface profiler using a cylindrical cavity resonator, where one end of the cavity is replaced by a thin metal diaphragm with a stylus probe tip. Good surface profile was successfully obtained with this device. A 10 nm depth trench was clearly observed together with a 10 μm trench in a single scan without gain control. This result clearly demonstrates an extremely wide dynamic range of the FDSM displacement sensors.