Article ID: 2024SEP0002
We report a hybrid fabrication process for superconductor large-scale integrated circuits (ICs) with ferromagnetic π-shifted Josephson junctions (π junctions) and conventional 0 junctions. π junctions have a Nb/PdNi/Nb sandwich structure and are formed on the reliable Nb four-layer structure used for Nb/AlOx/Nb 0-junction-based ICs. The additional process for making π junctions causes little damage to the 0 junctions. The π phase shift for the superconducting macroscopic wave function is confirmed by forming 0-0-π SQUIDs that have two 0 junctions and one π junction in a superconducting loop. The π junction serves as the π phase shifter because the critical currents of the π junctions are much larger than those of the 0 junctions. The modulation patterns of the 0-0-π SQUIDs show a clear shift by the magnetic field corresponding to the half flux quantum (HFQ). The critical currents of the 0-0-π SQUIDs without fields, which are referred to as the nominal critical currents, are reduced depending on the product of the loop inductance and the critical current of the 0 junction. The nominal critical current reaches 1/5 of the critical current of the single 0 junction. The small values of the nominal critical currents contribute to the reduction of the power consumption in the HFQ circuit directly.
