No Reference Quality Assessment of Contrast-Distorted SEM Images Based on Global Features

Abstract

This letter presents a global feature-based method for evaluating the no reference quality of scanning electron microscopy (SEM) contrast-distorted images. Based on the characteristics of SEM images and the human visual system, the global features of SEM images are extracted as the score for evaluating image quality. In this letter, the texture information of SEM images is first extracted using a low-pass filter with orientation, and the amount of information in the texture part is calculated based on the entropy reflecting the complexity of the texture. The singular values with four scales of the original image are then calculated, and the amount of structural change between different scales is calculated and averaged. Finally, the amounts of texture information and structural change are pooled to generate the final quality score of the SEM image. Experimental results show that the method can effectively evaluate the quality of SEM contrast-distorted images.