4-2 青色発光EL用CaGa_2S_4 : Ce薄膜の作製

抄録

Ce-doped calcium thiogallate (CaGa_2S_4 : Ce) thin films for blue-emitting thin film electroluminescent devices have been prepared by multi-source deposition technique using Ca metal, Ga_2S_3 and CeCl_3 source. The thin film consisted of CaGa_2S_4 and GaS was prepared at a substrate temperature of 550℃, a flux ratio, Ga_2S_3/Ca, of 70.