1993 年 17 巻 16 号 p. 7-12
New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure, as well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low smear level, less than -110dB, was achieved at 1MHz frame shift frequency. Furthermore, a 1.2×10^5 electron charge handling capability was obtained at up to 1.4MHz frame shift frequency.