表面と真空
Online ISSN : 2433-5843
Print ISSN : 2433-5835
論文
低ガス放出表面としてのSUS316L鋼酸化クロム処理の評価
板倉 明子土佐 正弘矢ヶ部 太郎宮内 直弥笠原 章宮田 敏光進藤 豊彦
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2018 年 61 巻 10 号 p. 675-680

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We have developed chromium oxide layer segregated on electrolytic polished stainless steel (SS316L) surface as inner coat of the ultra-high vacuum chamber. In order to investigate the superiority of the surface of chromium oxide on electrolytic polished surface compared with the only electrolytic polished surface, the thermal desorption characteristics and the initial exhaust characteristics after the air exposure were investigated. We found that the initial evacuation such as mass number m/z=14 (mixture of N and CH2) and 18 (H2O) as well as reduction of hydrogen release amount in temperature raising desorption is faster than electrolytic polished surface. It was found to be suitable for surface treatment when quick exhaust of high vacuum region such as a load lock chamber is desired.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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