低ガス放出表面としてのSUS316L鋼酸化クロム処理の評価

抄録

We have developed chromium oxide layer segregated on electrolytic polished stainless steel (SS316L) surface as inner coat of the ultra-high vacuum chamber. In order to investigate the superiority of the surface of chromium oxide on electrolytic polished surface compared with the only electrolytic polished surface, the thermal desorption characteristics and the initial exhaust characteristics after the air exposure were investigated. We found that the initial evacuation such as mass number m/z＝14 (mixture of N and CH₂) and 18 (H₂O) as well as reduction of hydrogen release amount in temperature raising desorption is faster than electrolytic polished surface. It was found to be suitable for surface treatment when quick exhaust of high vacuum region such as a load lock chamber is desired.