Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Regular article
Non-Evaporable Getter (NEG) Coating Using Titanium and Palladium Vacuum Sublimation
Tetsuya MIYAZAWAKensuke TOBISHIMAHiroo KATOMasashi KURIHARAShinya OHNOTakashi KIKUCHIKazuhiko MASE
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2018 Volume 61 Issue 4 Pages 227-235

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Abstract

We have developed a new non-evaporable getter (NEG) coating using titanium and palladium vacuum sublimation. The inner wall of the test chamber was coated with a 1-µm Ti thin film using the Ti sublimation pumps under a vacuum of 6.5×10−6 Pa (Ti-coated chamber). This chamber was then coated with a 10-nm Pd thin film using the Pd sublimation filament under a vacuum of 2.4×10−4 Pa (Pd/Ti-coated chamber). The uncoated, Ti-coated, and Pd/Ti-coated chambers were baked for 6 h at a maximum temperature of 185℃. Five hours after closing the valve, the pressures in the Pd/Ti-coated chamber were about 1.4×10−6 Pa even after six heating–venting cycles. The relatively low activation temperature was attributed to the low concentration of oxygen in the Pd/Ti thin films. The Pd/Ti coating can be used for vacuum systems that are frequently vented.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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