特集「二次イオン質量分析法（SIMS）の最近の進歩と有機分析への応用」
二次イオン質量分析法（SIMS）を巡る国際標準化の動向
2018 年 61 巻 7 号 p. 463-468
詳細
2018 年 61 巻 7 号 p. 463-468
The international standards for SIMS are developed in ISO TC 201 SC 6. Seven standards for dynamic SIMS and three standards for TOF-SIMS have been developed so far. And, two standards are being developed now. In this paper, two standards which are related to detector saturation are explained. Then the trend of ISO on SIMS is also introduced.
