Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Research Forefront of Surface and Vacuum Science Developed by Data-Driven Approach
Measurement Informatics in Surface Science
∼Historical Evolution and Future Prospect∼
Daisuke FUJITA
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2019 Volume 62 Issue 3 Pages 122-129


Following the historical development of informatics, data-intensive science, machine learning and materials informatics, we introduce important applications to surface science. As an indication of first application of multivariate analysis to surface science, application of target factor analysis to depth profiling data by Auger electron spectroscopy is introduced including the detailed analysis principle. We believe the way the future measurement system should be is a “smart measurement system” linked with cyber space and physical space. In such a data driven measurement system, novel informatics that can be applied to big measurement data are required. From such a viewpoint, the fusion of surface analysis and informatics, that is, “surface measurement informatics” is expected as a new paradigm of surface science.

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