2019 Volume 62 Issue 7 Pages 439-442
The cross sectional method with Ar ion beam is often used for Scanning Electron Microscopy (SEM). It is suitable for observation and analysis by SEM because of large process area with ultra clean surface. However, there are not many reports about cross sectioning for high resolution SEM using Ar ion beam due to the heating damage during the process. Recently, we have succeeded in developing a cooling system with Liquid Nitrogen (LN2) for Ar ion beam method, minimizing damage during cross sectional process. In this report, we introduce the effect of cross sectional method with Ar ion beam using LN2 cooling and application of high resolution SEM.
