Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Surface Modification and Coating for Vacuum Equipment
Molybdenum Disulfide Solid Lubricant Coating for Ultrahigh Vacuum
Toshiyuki MARUYAMATomoaki TAKAHASHIMasahiro TOSA
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2020 Volume 63 Issue 2 Pages 56-60

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Abstract

Lubricant in a manipulation mechanism is a key technology for an ultra-high vacuum equipment. Lubricant for ultra-high vacuum requires high durability, high wear resistant and low outgassing in order to implement a high-performance manipulation mechanism and develop a multi-functional ultra-high vacuum equipment. We developed high-performance molybdenum disulfide solid lubricant sputter coating in ultrahigh vacuum environment.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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