Molybdenum Disulfide Solid Lubricant Coating for Ultrahigh Vacuum

Abstract

Lubricant in a manipulation mechanism is a key technology for an ultra-high vacuum equipment. Lubricant for ultra-high vacuum requires high durability, high wear resistant and low outgassing in order to implement a high-performance manipulation mechanism and develop a multi-functional ultra-high vacuum equipment. We developed high-performance molybdenum disulfide solid lubricant sputter coating in ultrahigh vacuum environment.