Development and Characterization of Micro Arc Oxidation Process for Vacuum Equipment

Abstract

We have developed a method of micro arc oxidation treatment as a surface treatment of aluminum alloy used for vacuum equipment using corrosive gas such as chemical vapor deposition (CVD) equipment. The oxide layer formed by the micro arc oxidation (MAO) treatment was evaluated. The oxide layer formed by MAO had a three layer structure of crystalline γ-alumina. Moreover, it turned out that the oxide layer does not contain other than the element derived from a base material. It was found that the outgassing amount of the aluminum alloy covered with this oxide layer was 1/10 compared to the sulfuric acid alumite treatment.