Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Surface Modification and Coating for Vacuum Equipment
Development and Characterization of Micro Arc Oxidation Process for Vacuum Equipment
Fumiaki ISHIGURESakae INAYOSHI
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2020 Volume 63 Issue 2 Pages 61-63

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Abstract

We have developed a method of micro arc oxidation treatment as a surface treatment of aluminum alloy used for vacuum equipment using corrosive gas such as chemical vapor deposition (CVD) equipment. The oxide layer formed by the micro arc oxidation (MAO) treatment was evaluated. The oxide layer formed by MAO had a three layer structure of crystalline γ-alumina. Moreover, it turned out that the oxide layer does not contain other than the element derived from a base material. It was found that the outgassing amount of the aluminum alloy covered with this oxide layer was 1/10 compared to the sulfuric acid alumite treatment.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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