特集「真空機器の表面改質および被覆技術」
超高真空対応二硫化モリブデン固体潤滑膜
2020 年 63 巻 2 号 p. 56-60
詳細
2020 年 63 巻 2 号 p. 56-60
Lubricant in a manipulation mechanism is a key technology for an ultra-high vacuum equipment. Lubricant for ultra-high vacuum requires high durability, high wear resistant and low outgassing in order to implement a high-performance manipulation mechanism and develop a multi-functional ultra-high vacuum equipment. We developed high-performance molybdenum disulfide solid lubricant sputter coating in ultrahigh vacuum environment.
