Combined Multi-technique XPS System Focusing on Low Energy Inverse Photoelectron Spectroscopy and Ultraviolet Photoelectron Spectroscopy

Abstract

Multi-technique XPS (x-ray photoelectron spectroscopy) system is a trend for current surface analysis field. Not only delivering the information of chemical state composition, with options of ultraviolet photoelectron spectroscopy (UPS), low-energy inverse photoelectron spectroscopy (LEIPS) and reflection electron energy loss spectroscopy (REELS), it delivers the electrical properties of the solid surface. Moreover, XPS equipped with a sputter ion source further enables us to explore the chemical information from underneath the surface. In this article, the multi-technique XPS system and its application on organic and inorganic materials are demonstrated. In particular, the combination of UPS/LEIPS and argon gas cluster ion beam (Ar-GCIB) shows the capability of energy diagram analysis in depth on organic materials. And, the bandgaps of inorganic materials obtained by UPS/LEIPS and REELS correlate well. Hence, using combination techniques, multi-techniques XPS system provides highly reliable evaluation method to determine the bandgaps for inorganic materials.