Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Recent progress in Practical Surface Analysis
An Introduction and Recent Trends of XPS
Yusuke FUTAMATA
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2021 Volume 64 Issue 11 Pages 499-503

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Abstract

X-ray photoelectron spectroscopy (XPS) is one of the most useful and powerful techniques for surface analysis of solid materials. In recent years, to meet growing research demands for materials characterization, XPS instrumentation and application technology have been developing. In this article, a brief introduction of XPS along with an overview of recent trends in application of the technique are provided.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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