Special Feature : Heterogeneous Material Integrated Semiconductor Device for Society 5.0
Future Perspectives of Si Electronics and Heterogeneous Integration
2021 Volume 64 Issue 2 Pages 62-67
Details
2021 Volume 64 Issue 2 Pages 62-67
The advancements of Si electronics from the past to the present are reviewed and the future technological trends are discussed based on the semiconductor roadmap. The development of the heterogeneous integration is also discussed.
