Silicon Photonics Using Heterogeneous Integration for Society 5.0

Abstract

Si photonics based on heterogeneous integration will play an important role in Society 5.0. In particular, an optical phase shifter is an essential building block for high-speed optical interconnection. We have developed efficient and low-loss optical phase shifter using a III-V/Si hybrid metal-oxide-semiconductor (MOS) capacitor. We have also applied a hybrid MOS optical phase shifter to realize a programmable photonic integrated circuit for deep learning accelerator.