特集「表面分析における装置・計測・解析手法の発展と応用例」
FIB-TOF-SIMSによる微小粒子の表面および断面の分析
2022 年 65 巻 3 号 p. 115-120
詳細
2022 年 65 巻 3 号 p. 115-120
Originally developed high-spatial focused ion beam secondary ion mass spectrometer (FIB-TOF-SIMS) is described. The FIB-TOF-SIMS has a unique function such as micro-cross-sectioning of small particles and analysis of interior of the particle. Three types of applications are explained. The first one is individual particle analysis of aerosol. Chemical reaction of yellow sands in air was revealed with the FIB-TOF-SIMS analysis. The second one is biological application. A 3D-culture (spheroid) sample was analyzed after cross-sectioning. The last one is application to decommissioning of the Fukushima-Daiichi power plant. The most important feature, isotope imaging without isobaric interference by means of resonance ionization using tunable Ti:Sapphire lasers integrated on the FIB-TOF-SIMS.
