Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : Atomically Controllable Synthesis of Novel Materials Using Chemical Vapor Deposition
Crystal Orientation Control of Hexagonal Boron Nitride/Graphene Heterostructure
Yoshitaka TANIYASU Shengnan WANG
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2022 Volume 65 Issue 4 Pages 190-195

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Abstract

Hexagonal boron nitride (h-BN) is an indispensable material for two-dimensional van der Waals (vdW) materials-based devices. Scalable fabrication methods for high-quality h-BN are essential for the industrial applications. In addition, control of the interlayer angles of stacked 2D vdW materials is crucial for tailoring their electrical properties. In this article, we introduce chemical vapor deposition (CVD) growth of single-orientation h-BN. Then we propose an epitaxial intercalation method for vertically stacked h-BN/graphene bilayers with a high uniformity and a controlled interlayer angle.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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