Applied Research on Si-containing Diamond-like Carbon Films and Fundamental Research on Si Incorporation into the Films

Abstract

In this paper, we focus on the performance improvement of diamond-like carbon (DLC) by adding Si atoms, and summarize the conventional research developments centered on the friction application of Si-containing DLC (Si-DLC) thin films. In addition, we introduce new research and application development of Si-DLC in recent years. After recognizing and sharing the importance of Si incorporation into the Si-DLC thin films, we also introduce the mass spectrometric measurements of Si-containing hydrocarbon ions and radicals in tetramethylsilane plasmas for the purpose of understanding the plasma used for the synthesis of Si-DLC thin films.