International Standardization of Local Elastic Modulus Measurement by Atomic Force Microscopy and Its Application to Materials Industry

Abstract

This paper describes the international standardization activities of ISO/TC201/SC9/WG7, including the standardized method and a new method currently undergoing international round-robin testing for local elastic modulus measurement using atomic force microscopy, future prospects including extension to viscoelastic measurement. This paper will also include examples of how the local elastic modulus measurement method can be utilized in the materials industry.